Method for manufacturing pattern forming body and pattern manufacturing apparatus

ABSTRACT

The main object of the present invention is to form an even pattern. In order to achieve the object, in the present invention, patterns P 1  to P 6  formed on a substrate  400  are formed by liquid droplets discharged from a piezoelectric driving type head unit  300 . The size of each liquid droplet discharged from each orifice  300 - 1  to  300 - n  differs depending on the mechanical and electric characteristics. The liquid droplets discharged form each orifice  300 - 1  to  300 - n  are thinned out so as to have the liquid droplet amount per unit area to be impacted on each pattern p 1  to P 6  equally.

TECHNICAL FIELD

The present invention relates to a pattern forming method, capable offorming a high definition pattern, and a pattern producing apparatus.

BACKGROUND ART

A color liquid crystal display comprises color filters corresponding toa color to be displayed per pixel. As a method for manufacturing a colorfilter, conventionally, a pigment dispersion method of repeating aphotolithography process for a plurality of times, or the like has beenused. Recently, for the main purpose of cost reduction, a method ofusing an ink jet apparatus attracts the attention.

The pattern pitch of a color filter tends to be finer and fineraccording to the high definition of the color liquid crystal displays.The amount of ink discharged from the ink jet apparatus is a few picoliter, and thus it is extremely small. In order to form a pattern of asmall line width, it is necessary to have a small discharging amount.Also in this regard, the ink jet apparatus is preferable for themanufacturing a color filter.

According to the ink jet apparatus, a color filter pattern is produced,in general, by using a head unit provided with a plurality ofpiezoelectric driving type heads.

However, due to mechanical and electric variation of each piezoelectricdriving type heads, the liquid droplet amount discharged form eachpiezoelectric driving type head is uneven although the same drivingpulse is applied. If the ink discharging amount is not even, thethickness of the coloring layer or the like constituting the colorfilter becomes uneven.

That is, when a color filter is manufactured by using the conventionalink jet apparatus, derived form the uneven ink discharging amount, thereis a problem that unevenness of the display color of the color filter isgenerated.

DISCLOSURE OF THE INTENTION

The present invention has been achieved in view of the above-mentionedproblems, and the problem to be solved is to provide an inkjet apparatusand a pattern forming method, suitable for forming an even pattern evenwhen the liquid droplet amount discharged from each piezoelectricdriving type head is uneven.

In the present invention, in order to solve the above mentionedproblems, a method for manufacturing a pattern forming body, for forminga pattern on a substrate by discharging a plurality of liquid dropletsto the substrate from each head while changing the relative position ofa head unit with a plurality of integrated heads and the substrate,wherein a pattern of a lyophilic area, where the liquid droplets wet andspread, corresponding to a pattern to be formed is formed on thesubstrate surface, and the discharging of the liquid droplets of theeach head is thinned out according to a predetermined rule such that theliquid droplet amount per unit area to be impacted on the lyophilic areais made even, is provided.

In the invention, since the liquid droplets discharged from each head isthinned out so as to make the liquid droplet amount even per unit area,although the discharging amount per one shot of each head differs, aneven pattern can be formed. Moreover, since the lyophilic area, wherethe liquid droplets wet and spread, are formed preliminarily on thesubstrate, although the liquid droplet discharge is thinned out, theimpacted liquid droplets on the adjacent parts wet and spread to thethinned out part, the solution can be spread evenly in a pattern so thatunevenness cannot be generated in the pattern. Therefore, an extremelyaccurate pattern can be formed inexpensively.

Moreover, at the time, it is preferable that the each head dischargesthe liquid droplets based on the discharging position information,preliminarily determined for the each head, showing the position on thelyophilic area of the liquid droplets to be impacted. Since thedischarging position information determines the position for each headon the lyophilic area of the liquid droplets to be impacted, by settingthe discharging position information based on the discharging amountdifference between the heads, the discharging amount difference betweenthe heads can be cancelled so as to form an even pattern.

Furthermore, it is preferable that the discharging position informationis determined such that the position of thinning out the liquid dropletdischarge is dispersed substantially even in the lyophilic area.Although the liquid droplets wet and spread in the lyophilic area, therange has certain limitation. Therefore, when the areas without theliquid droplet discharge are provided continuously, unevenness may begenerated in a pattern. However, according to the present invention,since the position of thinning out the liquid droplet discharge isdetermined so as to be dispersed substantially even in the lyophilicarea, the liquid droplets can be dispersed evenly in the pattern.

Here, the discharging position information preferably designates dots toexecute the liquid droplet discharge out of the plurality of dotspositioned equally on the lyophilic area, and is determined based on thevolume of the pattern to be formed and the discharging amount of theeach head. According to the present invention, since the existence orabsence of the discharge is determined for each dot, the dischargingamount difference between the dots can be cancelled by thinning out thedischarge so that an even pattern can be formed.

Furthermore, the discharging position information can be produced bycalculating the number of dots in the pattern based on the smallestdischarging amount out of the discharging amounts of the each head andthe volume of the pattern to be formed, calculating the average value ofthe discharging amounts of the each head, determining the existence orabsence of the discharge for each dot based on the average value,calculating each difference value of the discharging amount of the eachhead and the average value, and adjusting the existence or absence ofthe discharge for each dot based on the difference value. Since most ofthe discharging amounts of the each head are provided in the vicinity ofthe average value, according to the present invention, the dischargingposition information can be produced efficiently.

Moreover, the discharging position information can be provided bycalculating the number of dots in the pattern based on the smallestdischarging amount out of the discharging amounts of the each head andthe volume of the pattern to be formed, calculating each differencevalue of the discharging amount of each head and the smallestdischarging amount, and determining the existence or absence of thedischarge for each dot based on the difference value. According to thepresent invention, since the existence or absence of the discharge isdetermined for each dot based on the smallest discharging amount, thedischarging position information can be produced efficiently.

Here, it is preferable that the discharging position information isdetermined so as to thin out the liquid droplet discharge at the endpart of the lyophilic area. For example, when the discharge is executedon the lyophilic area to form a linear pattern, the film thickness tendsto be thicker at the both end parts of the line. Therefore, by thinningout the liquid droplet discharge at the end part of the lyophilic areaso as not to execute the discharge to the end part, a pattern can beformed with an even film thickness over the entire surface.

In the invention, it is preferable that the pattern of the lyophilicarea formed on the substrate surface is formed by using a wettabilityvariable layer, capable of changing the wettability by a function of aphotocatalyst accompanied by the energy pattern irradiation, andirradiating energy in a pattern onto the wettability variable layer. Byforming the lyophilic area on the wettability variable layeraccordingly, a high definition lyophilic area can be formed easily bythe energy pattern irradiation. Thereby, a pattern forming body having ahigh definition pattern, such as a color filter, can be manufactured.

At the time, the wettability variable layer may be a wettabilitychangeable layer having the wettability changed by being contacted to aphotocatalyst processing layer containing a photocatalyst, or beingenergy irradiated after located with a gap of 200 μm or less. In thiscase, since the photocatalyst does not remain in the pattern formingbody, it is advantageous in that the physical property change of thepattern forming body can hardly be generated by the time passage.

In contrast, the wettability variable layer may be a photocatalystcontaining layer comprising a photocatalyst and a binder, having thewettability changed so as to lower the contact angle with a liquid bythe function of the photocatalyst accompanied by the energy irradiation.By using the photocatalyst containing layer as the wettability variablelayer, a high definition pattern can be formed only by irradiatingenergy.

Moreover, it is preferable that the photocatalyst is one or two or moresubstances selected from a titanium oxide (TiO₂), a zinc oxide (ZnO), atin oxide (SnO₂), a strontium titanate (SrTiO₃), tungsten oxide (WO₃),bismuth oxide (Bi₂O₃), and an iron oxide (Fe₂O₃). In particular, it ispreferable that the photocatalyst is a titanium oxide (TiO₂). The bandgap energy of a titanium oxide is high so that it is effective as aphotocatalyst, it is chemically stable without the toxicity, and it canbe obtained easily so that a wettability variable layer using a titaniumoxide can be used preferably, and thus detection of the wettabilitypattern defect is highly required.

At the time, it is preferable that the binder or the wettabilitychangeable layer is a layer containing an organo polysiloxane as ahydrolyzed condensation product or a co-hydrolyzed condensation productof one or two or more kinds of silicon compounds represented byY_(n)SiXt_((4-n)) (here, Y is an alkyl group, a fluoro alkyl group, avinyl group, an amino group, a phenyl group or an epoxy group, and X isan alkoxyl group, or a halogen. N is an integer from 0 to 3). By usingsuch a material, the wettability change accompanied by the energyirradiation can be provided drastically, and thus it is preferable forthe subsequent pattern formation.

Next, the present invention provides a pattern producing apparatus forforming a pattern on a substrate by discharging a plurality of liquiddroplets from each head to the substrate while changing relativeposition of a head unit with a plurality of integrated heads and thesubstrate, comprising: a stage for placing the substrate, a positionadjusting mechanism for adjusting the relative positional relationshipbetween the stage and the head unit, and a control section fordischarging the liquid droplets from the each head while thinning outthe liquid droplet discharge of the each head according to apredetermined rule such that the liquid droplet amount per unit area tobe impacted on the substrate is made even between the each head.

According to the pattern producing apparatus, the liquid droplets aredischarged from each head while changing the relative position betweenthe head unit and the substrate by the position controlling mechanism.Since the liquid droplet discharge of each head is thinned out at thetime so that the liquid droplet amount per unit area to be impacted onthe substrate is made even between the each heads, an even pattern canbe formed although the discharging amount per one shot of each headdiffers.

Here, it is preferable that the control section comprises a memorysection for storing discharging position information, preliminarilydetermined for the each head, showing the position on the substrate ofthe liquid droplets to be impacted so that the liquid droplet dischargefrom the each head is controlled based on the discharging positioninformation read out from the memory section. Since the dischargingposition information determines the position on the substrate of theliquid droplets to be impacted for each head, by setting the dischargingposition information based on the discharging amount difference betweenthe heads, the discharging amount difference between the heads can becancelled so as to form an even pattern.

Furthermore, it is preferable that the discharging position informationis determined such that the position of thinning out the liquid dropletdischarge is dispersed substantially even in the pattern formed on thesubstrate. According to the present invention, since the position ofthinning out the liquid droplet discharge is determined so as to bedispersed substantially even in the pattern, the liquid droplets can bedispersed even in the pattern so that a more even pattern can be formed.

Additionally, it is preferable that the head unit comprises a settingsection capable of setting whether the discharging operation is valid orinvalid for the each head, and the control section produces settinginformation for controlling the setting section based on the dischargingposition information and supplies the same to the setting section. Morespecifically, it is preferable that the each head comprises a commonpiezoelectric element, a common electrode and an individual electrodeeach corresponding to the each head are formed on the piezoelectricelement, the control section comprises a driving pulse producing sectionfor producing a driving pulse common to the each head and supplying thesame to the common electrode, and the setting section controls whetherthe each individual electrodes is to be grounded or opened based on thesetting information.

Furthermore, the present invention provides a method for manufacturing acolor filter, comprising a process of, a pattern of a coloring layerforming coating solution is formed by using the above mentioned methodfor manufacturing a pattern forming body, and then curing the same toform a coloring layer. According to the present invention, a highquality color filter with extremely even coloring layer film thicknesscan be manufactured.

As explained in the above, according to the present invention, an evenpattern can be formed although the discharging amount differs betweenthe each head.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view showing the external appearanceconfiguration of a discharging system of the present invention.

FIG. 2 is a perspective view showing the mechanical configuration of apiezoelectric driving type head unit used in the same system.

FIG. 3 is a cross-sectional view showing the configuration of apiezoelectric element used in the same unit.

FIG. 4 is a plan view showing the pattern of a color filter formed on asubstrate.

FIG. 5 is an explanatory diagram schematically showing the relationshipbetween the liquid droplet impact position and a piezoelectric drivingtype head unit 300.

FIG. 6 is a block diagram showing the electric configuration of the samesystem.

FIG. 7 is a circuit diagram of a driver circuit used in the same system.

FIG. 8 is a timing chart showing the operation of the same system.

FIG. 9 is a process diagram showing the manufacturing processes for acolor filter using the same system.

FIG. 10 is a flow chart showing the operation of a personal computer PCconcerning production of a bit map data BMD according to the firstembodiment.

FIG. 11 is an explanatory diagram for explaining the parameter inputscreen.

FIG. 12 is a flow chart showing the operation of a personal computer PCconcerning production of a bit map data BMD according to the secondembodiment.

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, an embodiment of the present invention will be explainedwith reference to the drawings.

1. Mechanical Configuration of the Discharging System

FIG. 1 shows the external appearance configuration of a dischargingsystem 1. The discharging system 1 comprises a personal computer PC, acontrol unit U1, a driving unit U2, and a producing apparatus u3. Theproducing apparatus U3 comprises a piezoelectric driving type head unit300, a reference platform 340, and a stage 350. Among them, thepiezoelectric driving type head unit 300 comprises a plurality ofpiezoelectric driving type heads so that an ink is discharged from eachpiezoelectric driving type head.

FIG. 2 is a perspective view showing the external appearanceconfiguration of the piezoelectric driving type head unit 300. In thedescription below, the piezoelectric driving type head unit 300comprises n pieces of piezoelectric driving type heads H1 to Hn. Thepiezoelectric driving type head unit 300 comprises a main body Q and apiezoelectric element PZ. In the main body Q, orifices 300-1 to 300-n asthe ink discharging holes, and walled off ink chambers for each orifice300-1 to 300-n are formed. Then, an ink is discharged from the eachorifice 300-1 to 300-n.

FIG. 3 is a cross-sectional view showing the configuration of thepiezoelectric element PZ. As shown in the figure, a common electrode Yis formed on the lower surface of the piezoelectric element PZ to beadhered with the main body Q, and electrodes X1 to Xn are formed on theupper surface thereof.

In the piezoelectric driving type head unit 300, each piezoelectricdriving type head H1 to Hn comprises each orifice 300-1 to 300-n, eachwalled off ink chamber for each orifice 300-1 to 300-n, and each partcorresponding to each electrode X1 to Xn of the piezoelectric elementPZ. Although the common piezoelectric element PZ is used for each headpiezoelectric driving type head H1 to Hn in this embodiment, of coursethe piezoelectric element PZ can be divided for each head.

Next, the stage 350 shown in FIG. 1 is movable in the X direction andthe Y direction with the reference platform 340 position as thereference by a stage driving mechanism which is not shown in the figure,and furthermore, it is rotatable in the θ direction. Moreover, the stage350 comprises a vacuuming mechanism, which is not shown in the figure,so that it can vacuum a substrate 400 to be placed thereon. In contrast,the head unit 300 is fixed to a wall 370 via an arm member 360.Furthermore, the wall 370 is fixed perpendicularly to the referenceplatform 340.

Therefore, by fixing the substrate 400 onto the stage 350 using thevacuuming mechanism and moving the stage 350 by the stage drivingmechanism, the relative position of the substrate 400 and the head unit300 can be adjusted. In the producing apparatus U3, a pattern is formedby discharging an ink from the piezoelectric driving type heads H1 to Hnwhile moving the substrate 400.

FIG. 4 shows a color filter pattern to be formed on the substrate 400.The color filter of this embodiment has stripe-like patterns P, and eachmark “R”, “G, “B” shown in the figure denotes that the pattern P iscolored in the R color, the G color and the B color. Moreover, a lightshielding film called the black matrix is formed in between the patternsP.

FIG. 5 schematically shows the relationship between the liquid dropletimpact position and the piezoelectric driving type head unit 300. Thepiezoelectric driving type head unit 300 of this embodiment having 6pieces of the piezoelectric driving type heads H1 to H6, and comprisesthe orifices 300-1 to 300-6. In this figure, black round dots D show theliquid droplet impact positions, and white round dots D show noexecution of the liquid droplet discharge. That is, the liquid dropletdischarge is thinned out. In the description below, the distance betweenthe each dot D is referred to as the dot pitch DP, and furthermore, thedistance from the center of a pattern to the center of the adjacentpattern is referred to as the pattern pitch PT.

As shown in the same figure, the piezoelectric driving type head unit300 is located in a certain angle to the longitudinal direction of thepattern P, not perpendicularly. This is because the pattern pitch PT issmaller than the distance W between the each orifice. The angle θ shownin the figure can be obtained from sin−1(W/PT).

Moreover, since the color density of each pattern P1 to P6 is determinedby the dot density, in the discharging system 1, the color density ischanged by adjusting the dot pitch DP.

Here, with the premise that the liquid droplets are discharged for allthe dots D, the liquid droplet amounts to be discharged from eachorifice 300-1 to 300-6 should be equal in order to have the even colordensity between the each pattern P1 to P6. However, in the actualpiezoelectric driving type heads H1 to H6 have uneven mechanical andelectric characteristics, the liquid droplet amounts discharged from theeach orifice 300-1 to 300-6 is not equal. So, in the discharging system1, by thinning out the liquid droplet discharge, the color density ofthe each patters P1 to P6 is made even.

For example, in the pattern P1, the liquid droplet discharge is thinnedout by a ratio of one time out of four times, and in the pattern P5, theliquid droplet discharge is thinned out by a ratio of two times out ofnine times. In the liquid droplet discharge in the pattern P5, adischarging operation of discharging for four times continuously,stopping for one time, discharging for three times continuously andstopping for one time is repeated. That is, the discharging operation isexecuted such that thinning out can be dispersed as much as possible.

As it will be described later, a lyophilic area is formed as thesubstrate adjusting process in the substrate 400. Since the lyophilicarea has good wettability, the liquid droplets wet and spread in a widerange. Therefore, even when the liquid droplets are not discharged to adot D by thinning out, the liquid droplets discharged to the adjacentdots D wet and spread, so that the thinned out dot D is coated with theink as well.

However, the liquid droplet cannot spread unlimitedly in the lyophilicarea, and the liquid droplet spreading range has certain limitation.Thinning out is dispersed for coating the ink as even as possible by theliquid droplets impact on the substrate 400 so as to make the colordensity in the pattern even.

Next, the personal computer PC shown in FIG. 1 produces a bit map dataBMD to a predetermined program, and transmits the same to the controlunit U1. Moreover, a monitor M is connected to the personal computer PCso that the image showing the discharging system 1 operation state, theimage schematically showing the liquid droplet impact position, or thelike are displayed thereon.

Here, the bit map data BMD is for determining the impact position of theliquid droplets discharged from the each piezoelectric driving typeheads H1 to Hn onto the substrate 400. In other words, “1” is allottedto those of the black circles, and “0” is allotted to those of the whitecircles for each dot D shown in FIG. 5. According to the bit map dataBMD, whether or not the liquid droplets are to be discharged to each dotcan be determined.

Next, the control unit U1 functions as the control center of thedischarging system 1 so that it controls the driving unit U2 and theproducing apparatus U3 based on the bit map data BMD transmitted formthe personal computer PC. Moreover, the driving unit U3 produces a highvoltage driving pulse, synchronously with a trigger signal sent out fromthe control unit U1, and supplies the same to the piezoelectric drivingtype head unit 300.

2. Production of the Bit Map Data

Next, production of the bit map data BMD will be explained. For theproduction of the bit map data BMD, there are two embodiments describedbelow. FIG. 10 is a flow chart showing the operation of the personalcomputer PC according to the first embodiment.

The personal computer PC displays an input screen for inputting theparameters necessary for producing the bit map data BMD on the monitorM, inducing the operator to input each parameter (step S1).

FIG. 11 shows an example of the input screen. On the monitor M, a firstinput screen G1 is displayed. Here, the line width denotes the pattern Pwidth, and the line length denotes the pattern length. Furthermore, theheight denotes the pattern P film thickness. According to theseparameters, the volume of a pattern P can be calculated. In thisembodiment, the operator inputs X as the line width, Y as the linelength, and H as the height.

Additionally, the orifice No. used denotes the numbers of the orificesto discharge the liquid droplets out of the each orifice 300-1 to 300-nof a head unit 300. In this embodiment, n=128, and the 21^(st) orifice300-21 to the 116^(th) orifice 300-116 are to be used.

When the operator completes the input of the each parameter of the inputscreen G1, the personal computer PC displays an input screen G2 on themonitor M, inducing the operator to input the discharging amount per onetime of discharge for the orifices to be used. The operatorpreliminarily measures the discharging amount (volume) from the eachorifice 300-1 to 300-n. As to the discharging amount, an ink isdischarged actually from the each orifice 300-1 to 300-n, and the valueof the weight observation is converted from the specific gravity of theink. When the operator inputs the discharging amount, the personalcomputer PC memorizes each orifice number and the discharging amountcorresponding with each other.

When the input of the parameter is finished, the personal computer PCforwards the process to the step S2 shown in FIG. 10 for specifying thesmallest discharging amount. Next, the personal computer PC calculatesthe number of dots in the pattern and the dot pitch DP based on thesmallest discharging amount (step S3). The number of dots is calculatedby dividing the pattern volume by the smallest discharging amount.Specifically, with the premise that the number of dots is SD and thesmallest discharging amount is Kmin, the personal computer PC calculatesthe number of dots DS by the following formula: SD=(X·Y·H)/Kmin.

Moreover, the personal computer PC calculates the dot pitch DP by thefollowing formula: DP=Y/SD=Kmin/(X·H).

Next, the personal computer PC produces the layout data of the dots D(step S4). The layout data for showing the arrangement of each dot D areproduced based on the orifice numbers to be used and the number of dots.At this point, only the dot D arrangement is determined, and thus whichdots D are to be valid or invalid is not determined yet.

Next, the personal computer PC calculates the average value of thedischarging amount from the each orifice 300-1 to 300-n (step S5).Furthermore, it produces the bit map data BMD for all the dots based onthe average value. Here, with the premise that the average value isKavr, the bit map data BMD with the dots thinned out by a 1-Kmin/Kavrratio are produced. For example, in the case the average value Kavr is10 p1, and the smallest discharging amount Kmin is 9 p1, the 1-Kmin/Kavrvalue is 0.9 so that one dot D is thinned out (invalid) with respect to10 dot Ds, and 9 dots Ds are valid.

Next, the personal computer PC calculates the difference from theaverage value for each orifice 300-1 to 300-n (step S7). Here, eachdifference value is shown by % based on the average value. For example,if the discharging amount of an orifice is 10.5 pl, the difference valueΔ corresponding to the orifice is calculated by the following formula:Δ=100·(10.5−Kavr)/Kavr=+5%.

Next, the personal computer PC adjusts the bit map data BMD based on thedifference value for each orifice 300-1 to 300-n (step S8). For example,in the case the difference value Δ is −10%, the bit map data BMD areadjusted such that one dot D is valid with respect to 10 dot Ds, and inthe case the difference value Δ is +5%, the bit map data BMD areadjusted such that one dot D is invalid with respect to 20 dot Ds.

Thereby, even when the ink discharging amounts discharged form the eachorifice 300-1 to 300-n differ, the unevenness between the piezoelectricdriving type heads H1 to Hn can be adjusted by making the liquid dropletimpact amount per unit area on the substrate 400 even. In other words,the personal computer PC produces the bit map data BMD such that theliquid droplet impact amount per unit area on the substrate 400 is madeeven based on the parameters.

Next, FIG. 12 shows a flow chart showing the operation of the personalcomputer PC according to a second embodiment. Since the process in thesteps S1 to S4 is same as that in the first embodiment, explanation isomitted.

When the step S4 is finished, the personal computer PC calculates thedifference value Δ for the discharging amounts form the each orifice300-1 to 300-n based on the smallest discharging amount Kmin (step S9).

Here, the difference value Δ is represented by % based on the smallestdischarging amount Kmin. For example, when the discharging amount of anorifice is 11 pl and the smallest discharging amount Kmin is 10 pl, thedifference value Δ corresponding to the orifice is calculated by thefollowing formula: Δ=100·(11−Kmin)/Kmin=+10%.

Next, the personal computer PC produces the bit map data BMD based onthe difference value for each orifice 300-1 to 300-n (step S10). Forexample, when the difference value Δ is +10%, the bit map data BMD areproduced such that one dot D is invalid with respect to 10 dots D.

Thereby, even when the ink discharging amounts discharged form the eachorifice 300-1 to 300-n differ, the unevenness between the eachpiezoelectric driving type head H1 to Hn can be corrected by making theliquid droplet impact amount per unit area on the substrate 400 even. Inother words, the personal computer PC produces the bit map data BMD suchthat the liquid droplet impact amount per unit area on the substrate 400is made even based on the parameters.

In the above mentioned first and second embodiments, the personalcomputer PC produces the bit map data BMD such that the dots Dcorresponding to thinning out are dispersed substantially even in thepattern. For example, in the case of thinning out the dischargecorresponding to 5 dot Ds out of 100 dot Ds, the personal computer PCproduces the bit map data BMD for commanding the discharging forcontinuous 19 dot Ds, and commanding the discharging stoppage for thesubsequent one dot D.

Moreover, in the above mentioned first and second embodiments, a manualbit map data BMD adjusting process may be added. In the adjustingprocess, the bit map showing valid or invalid for each dot D isdisplayed on the monitor M so that the operator can designate the dot Dsdesired to be changed by using an inputting device such as a mouse toinput the change command. In this case, the personal computer PC caninvert valid and invalid for the dots D designated for the change. Forexample, in the case a dot D is designated, if the bit map data BMDvalue corresponding to the dot D is “1” the value can be changed to “0”,and if the value is “0”, the value can be changed to “1”.

Furthermore, in the above mentioned first and second embodiments, ameasuring device for automatically measuring the discharging amount ofeach orifice 300-1 to 300-n may be added to the producing apparatus U3so that the personal computer PC takes in the measurement result formthe measuring device. In this case, an electronic force balance and atest substrate are used. First, the weight of the test substrate ismeasured by the electronic force balance so that the measurement resultis taken into the personal computer PC. Second, the test substrate isplaced onto the stage 350 by an automatic conveying device. Third, anink is discharged for a plurality of times from an orifice. Fourth, thetest substrate is conveyed again to the electronic force balance formeasuring its weight so that the measurement result is taken into thepersonal computer PC. Fourth, the weight difference between before andafter the discharging is calculated by the personal computer PC, and thecalculation result is divided by the number of the discharges forcalculating the one time discharging weight. Fifth, the personalcomputer PC converts the discharging weight by the ink specific gravityfor calculating the discharging amount. The discharging amount of theeach orifice 300-1 to 300-n may be taken into the personal computer PCautomatically by executing the process for each orifice 300-1 to 300-n.

3. Electronic Configuration of the Discharging System

Next, the electronic configuration of the discharging system 1 will beexplained. FIG. 6 is a block diagram showing the electronicconfiguration of the discharging system 1.

The control unit U1 comprises a control circuit 100, a RAM 110, a ROM120, a bit map memory 130 and an interface 140. The control circuit 100has a CPU as the principal part, which is connected to each constituentparts of the control unit 100 via a bus (not shown in the figure). TheRAM 110 functions as the work area for the control circuit 100 forstoring the data during the calculation, or the like. Moreover, in theROM 120, in addition to the boot programs, the control program forcontrolling the entire control unit U1 is stored. The control circuit100 controls the discharging system 1 according to this control program.Furthermore, the bit map memory 130 stores the bit map data BMDtransmitted form the personal computer PC. The interface 140 is for thecommunication with respect to the personal computer PC, and thecommunication protocol is based on, for example, the SCSI standard.

Moreover, the control circuit 100 controls a stage driving mechanism 320for moving the stage 350 and the substrate 400 shown in FIG. 1. In orderto move the stage 350, the position thereof should be detectedaccurately. A position detecting sensor 330 provided in the producingapparatus U3 is a configuration for detecting the position of the stage350, produces a position signal showing the position of the stage 350,and supplies the position signal to the control circuit 100 of thecontrol unit U1. The control circuit 100 moves the stage 350 and thesubstrate 400 based on the position signal.

Moreover, the control circuit 100 produces a trigger signal TG, whichbecomes active at a low level according to the control program. Thedriving unit U2 detects transition of the theoretical level of thetrigger signal TG from a high level to a low level, produces a drivingpulse V, and supplies the same to each piezoelectric driving type headH1 to Hn constituting the piezoelectric driving type head unit U3.Therefore, the driving pulse V will be synchronized with the triggersignal TG. Moreover, the driving unit U2 produces a response signal RSshowing the activating period of the driving pulse V and supplies thesame to the control circuit 100.

Next, the piezoelectric driving type head unit U3 comprises a drivercircuit 310. FIG. 7 is a circuit diagram showing the configuration ofthe driving circuit 310 and the peripheral circuit thereof. In thisfigure, capacitors C1, C2, . . . , Cn are shown by the piezoelectricelement PZ, comprising each piezoelectric driving type head H1 to Hn, asthe equivalent circuit. Each terminal to be connected with theconnection point y out of each terminal of the capacitors C1, C2, . . ., Cn corresponds to the common electrode Y shown in FIG. 3, and eachterminal on the side opposite to the connection point y corresponds tothe electrodes X1, X2, . . . , Xn shown in FIG. 3.

The driver circuit 310 comprises a shift register 311, a latch circuit312, and switches SW1, SW2, . . . , SWn. The shift register 311 takes inthe control data CD synchronized with a clock signal CLK. The controldata. CD are serial type data for designating whether each piezoelectricdriving type head H1 to Hn is to be valid or invalid. The control dataCD are produced by the control circuit 100 based on the bit map dataBMD. The latch circuit 312 latches each output signal of the shiftregister 311 based on a latch pulse LP. Then, on or off of each switchSW1, SW2, . . . , SWn is controlled based on the output signal CTL1,CTL2, . . . , CTLn of the latch circuit 312.

4. Discharging System Operation

Next, the operation of the discharging system 1 will be explained. FIG.8 is a timing chart showing an operation example of the dischargingsystem 1. In this example, the patterns P1 to P6 shown in FIG. 5 are tobe formed, and the relative position of the piezoelectric driving typehead unit 300 and the substrate 400 is as shown in FIG. 5.

When the piezoelectric driving type head unit 300 reaches at the line L1at the time t0, the control circuit 100 activates the trigger signal TG(low level).

The driving unit U2 which has received the trigger signal TG activatesthe driving pulse V in the period TA, and also activates the responsesignal RS (low level). Thereby, the driving pulse V is supplied to eachpiezoelectric driving type head H1 to H6. Since the output signals CTL1to CTL6 of the latch circuit 312 are “H, H, H, L, H” in the period TA,the switches SW1 to SW3, SW5 and SW6 become to the on state, and on theother hand, the switch SW4 becomes to the off state. Therefore, theliquid droplets are discharged from the orifices 300-1 to 300-3, 300-5and 300-6, and the liquid droplets are not discharged form the orifice300-4. That is, the liquid droplet discharge is thinned out for the dotD corresponding to the pattern P4 on the line L1.

Next, when the driving pulse V becomes inactive at the time t1, thedriving unit U2 inactivates the response signal RS (high level). Whenthe control circuit 100 detects the response signal RS in the inactivestate, it sends out the control data CD for the next discharge to thedriver circuit 310. Then, when the control circuit 100 activates thelatch pulse LP (time t2) after finishing the sending out operation ofthe control data CD, the latch circuit 312 latches each output signal ofthe shift register 311. Thereby, the theoretical level of the outputsignals CTL1 to CTL6 is switched.

In this example, the theoretical level of the output signal CTL3 ischanged from the high level to the low level, and the theoretical levelof the output signal CTL4 is changed from the low level to the highlevel.

Then, when the piezoelectric driving type head unit 300 reaches at theline L2 at the time t3, the control circuit 100 activates the triggersignal TG (low level). Then, also in the period TB as in the period TA,the driving pulse V is supplied to each piezoelectric driving type headH1 to H6. However, since the output signals CTL1 to CTL6 are “H, H, L,H, H” in the period TB, the switches SW1, SW2, and SW4 to SW6 are in theon state, and the switch SW3 is in the off state. Therefore, the liquiddroplets are discharged from the orifices 300-1, 300-2, and 300-4 to300-6, and the liquid droplets are not discharged form the orifice300-3. That is, the liquid droplet discharge is thinned out for the dotD corresponding to the pattern P4 on the line L2.

Hereafter, same as the above, by executing the liquid droplet dischargewith a predetermined dot D thinned out in the periods TC, TD, TE, . . ., the liquid droplet amount per unit area to be impact on the substrate400 of the ink discharged form each piezoelectric driving type head H1to Hn can be evened. Thereby, a pattern with even thickness can beformed so that a color filter with an even color density can beproduced.

5. Method for Manufacturing Pattern Forming Body

Next, the method for manufacturing a pattern forming body of the presentinvention will be explained. The method for manufacturing a patternforming body of the present invention is, for forming a pattern on asubstrate by discharging a plurality of liquid droplets to the substratefrom each head while changing the relative position of ahead unit with aplurality of integrated heads and the substrate,

wherein a pattern of a lyophilic area, where the liquid droplets wet andspread, corresponding to a pattern to be formed is formed on thesubstrate surface, and

the discharging of the liquid droplets of the each head is thinned outaccording to a predetermined rule such that the liquid droplet amountper unit area to be impacted on the lyophilic area is made even.

In the present invention, since the liquid droplets to be dischargedfrom each head are thinned out according to a predetermined rule, it isadvantageous in that the liquid droplet amount per unit area on thelyophilic area can be made even by onetime of coating process. Moreover,in the present invention, since the liquid droplet impact position is alyophilic area, even when the liquid droplets are thinned out, theliquid droplets can wet and spread so that even film thickness can beprovided. The lyophilic area here is not particularly limited as long asit has wettability to an extent that the impacted coating solution canwet and spread, and in particular, it is preferable to use a lyophilicarea to have the contact angle with the subject coating solution of 20°or less, preferably 10° or less.

Moreover, as the pattern of the pattern forming body to be formed in thepresent invention, a stripe-like pattern is preferable, and it ispreferable in the case of forming a stripe by the liquid droplets fromone head because the liquid droplet amount irregularity between theheads becomes a problem particularly in the case of forming such apattern.

In the present invention, it is preferable that the liquid dropletdischarge information from the heads is determined such that the liquiddroplet discharge thinning out positions are dispersed substantiallyequally in the lyophilic area because even film thickness may not beformed even when the impact liquid droplets wet and spread if thedischarging thinning out positions, that is, the positions without thedischarge are provided continuously.

In the present invention, to what extent of the interval thinning outcan be executed continuously is determined by preliminarily measuringthe wettability of the coating solution to the lyophilic area on thesubstrate, and making it within the same range. Moreover, it is alsopossible to determine the lyophilic area wettability so as to have theliquid droplets in even film thickness in the lyophilic area at the timethe liquid droplets are thinned out so as to even the head irregularityin an ink jet apparatus in a range ordinarily tolerated.

Moreover, in the present invention, it is preferable that thedischarging information is determined such that the liquid dropletdischarge is thinned out at the end part of the lyophilic area. Forexample, in the case of forming a stripe-like pattern, it is preferablenot to discharge the liquid droplets in the end parts of the lyophilicarea corresponding to the end parts of the stripe, that is, in the areafor starting the coating operation and the area for finishing thecoating operation.

In general, when the liquid droplets are coated using an ink jetapparatus, the end parts tends to have thicker film thickness. In thepresent invention, the thickening of the end parts can be made even bythinning out the liquid droplets discharge at the end parts. At thetime, since to what extent of the distance from the end parts the liquiddroplet discharge is to be thinned out differs drastically depending onthe wettability of the lyophilic area of each substrate and the coatingsolution to be coated, the viscosity of the coating solution, or thelike, in general it is preferable to determine the distance bypreliminarily executing a coating operation.

In the present invention, it is preferable that the pattern of thelyophilic area to be formed on the substrate surface is formed by usingthe wettability variable layer capable of changing the wettability bythe function of a photocatalyst accompanied by energy patternirradiation, and by irradiating energy onto the wettability variablelayer in a pattern-like form.

Since the method for forming the lyophilic area pattern utilizing thefunction of the photocatalyst can form the lyophilic area by the energypattern irradiation, a high definition lyophilic area pattern can beformed so that a high definition pattern forming body such as a colorfilter can be dealt with.

In the present invention, as the method for forming the lyophilic areapattern using the photocatalyst, there are an embodiment of using thewettability changeable layer as a wettability variable layer which thewettability is changed by the energy irradiation after contacting with aphotocatalyst processing layer containing a photocatalyst, or locatingwith a gap of 200 μm or less therebetween (hereinafter, it is referredto as the first embodiment), and an embodiment of using a photocatalystcontaining layer as the wettability variable layer which comprises aphotocatalyst and a binder, and the wettability is changed so as tolower the contact angle with a liquid by the function of thephotocatalyst accompanied by the energy irradiation (hereinafter, it isreferred to as the second embodiment). Hereinafter, each will beexplained.

(1) FIRST EMBODIMENT

First, an embodiment of using the wettability changeable layer will beexplained. The wettability changeable layer used in this embodiment hasa wettability pattern of a lyophilic area and a liquid repellent areaformed on its surface by exposure (Here, the exposure in the presentinvention is the concept including the energy irradiation. Moreover, theenergy of the energy irradiation denotes energy capable of changing thewettability of the wettability changeable layer or the photocatalystcontaining layer such as an ultraviolet ray) in a state contacted withthe photocatalyst processing layer containing a photocatalyst.

The wettability changeable layer is a wettability changeable layer whichthe wettability is changed so as to lower the contact angle of theliquid by the function of the photocatalyst accompanied by the energyirradiation. Thereby, the wettability can easily be changed by executingthe pattern exposure, or the like so that a pattern of a lyophilic areahaving a small contact angle with a liquid can be formed. Therefore, byexposing only the part those are to be the lyophilic area on thewettability changeable layer, that is, the area for forming the coloringlayer in the case of a color filter, a lyophilic area can be providedeasily. By adhering a coloring layer forming coating solution in thispart, for example, in the case of the color filter, a color filterhaving a coloring layer can be formed easily. Therefore, a color filtercan be manufactured efficiently so that it is advantageous in terms ofthe cost.

Here, the lyophilic area is an area having a small contact angle with apredetermined liquid as mentioned above, and thus it refers to an areahaving good wettability with respect to a pattern forming coatingsolution such as the coloring layer forming coating solution for a colorfilter, or the like. Moreover, the liquid repellent area is an areahaving a large contact angle with a liquid, and thus it refers to anarea having poor wettability with respect to a pattern forming coatingsolution such as the coloring layer forming coating solution for a colorfilter, or the like.

The wettability of the liquid repellent area and the lyophilic area tobe formed on the wettability changeable layer surface used in thisembodiment are preferably in the following ranges. That is, in theliquid repellent area, the contact angle with a liquid having 40 mN/msurface tension is preferably 10° or more, the contact angle with aliquid having 30 mN/m surface tension is preferably 10° or more, and inparticular the contact angle with a liquid having 20 mN/m surfacetension is 10° or more. This is because the water repellent area, thatis, the part which is not exposed is the part required to have theliquid repellency in this embodiment so that if the contact angle with aliquid is small, the liquid repellency is not sufficient so that thecoating solution, or the like may remain, and thus it is not preferable.

Moreover, in the lyophilic area of the wettability changeable layersurface, the contact angle with a liquid having 40 mN/m surface tensionis preferably 9° or less, the contact angle with a liquid having 50 mN/msurface tension is preferably 10° or less, and in particular the contactangle with a liquid having 60 mN/m surface tension is 10° or less. Thisis because spreading of the coating solution, or the like in this partmay be poor if the contact angle with a liquid is high in the lyophilicarea.

The contact angle in this embodiment was obtained from the results or agraph of the results by the measurement (30 seconds after droppingliquid droplets from a micro syringe) of the contact angle with liquidshaving various surface tensions using a contact angle measuring device(CA-Z type manufactured by Kyowa Interface Science Co., LTD.). Moreover,at the time of the measurement, as the liquids having the varioussurface tensions, wetting index standard solutions manufactured byJUNSEI CHEMICAL CO., LTD. were used.

As mentioned above, the wettability changeable layer used in thisembodiment is not particularly limited as long as it is made of amaterial which the surface wettability is changeable by the function ofthe photocatalyst. For example, it may be coated on a substrate, and onehaving the self supporting property itself such as a film-like one canbe used as well.

Having the self supporting property, in this embodiment denotes capableof existing in a tangible state without other supporting material.

As the material for the wettability changeable layer used in thisembodiment, specifically, a material which the contact angle, with aliquid having surface tension equivalent to the surface tension of thepattern forming coating solution to be coated thereafter, is changed byat least 1° or more, preferably 5°, in particular 10° or more by havingthe photocatalyst containing layer contacted with its surface andirradiating the energy can be presented.

As such a material, for example, a polyethylene, a polycarbonate, apolypropylene, a polystyrene, a polyester, a polyvinyl fluoride, anacetal resin, a nylon, an ABS, a PTFE, a methacrylic resin, a phenolresin, a polyvinylidene fluoride, a polyoxy methylene, a polyvinylalcohol, a polyvinyl chloride, a polyethylene terephthalate, a silicone,or the like can be presented.

In contrast, as to the material to be coated on the substrate to formthe wettability changeable layer, it is not particularly limited as longas it is a material having characteristics of the above mentionedwettability changeable layer, that is, which the wettability is changedby the function of the photocatalyst in the photocatalyst processinglayer to be contacted or located in the vicinity, by the exposure, andhaving a principal chain which is hardly deteriorated or decomposed bythe function of the photocatalyst.

Specifically, (1) an organo polysiloxane which provides high strength byhydrolyzing or polycondensating a chloro or alkoxy silane, or the likeby the sol gel reaction, or the like, (2) an organo polysiloxaneobtained by cross-linking a reactive silicone having the excellent waterrepellent property or oil repellent property, or the like can bepresented.

In the case (1), it is preferably an organo polysiloxane as a hydrolyzedcondensation product or a co-hydrolyzed condensation product of one kindor two or more kinds of silicon compounds represented by the generalformula:

Y_(n)SiX_((4-n)).

(Here, Y is an alkyl group, a fluoro alkyl group, a vinyl group, anamino group, a phenyl group or an epoxy group, and —X is an alkoxylgroup, an acetyl group or a halogen. N is an integer from 0 to 3). Here,the number of carbon atoms of the group represented by Y is preferablyin a range of 1 to 20. Moreover, the alkoxy group represented by X ispreferably a methoxy group, an ethoxy group, a propoxy group, or abutoxy group. Moreover, in particular, a polysiloxane containing afluoro alkyl group can be used preferably. Those known in general as afluorine based silane coupling agent can be used.

The specific materials, or the like, are disclosed in detail in theofficial gazette of the Japanese Patent Application Laid Open (JP-A) No.2000-249821 applied by the present inventor, or the like.

Moreover, as the reactive silicone (2), compounds having a skeletonrepresented by the following general formula can be presented.

Here, n is an integer of 2 or more, R¹, R² each are a substituted or nonsubstituted alkyl, alkenyl, aryl or cyano alkyl group having 1 to 10carbon atoms, and 40% or less of the entirety based on the molar ratiois a vinyl, a phenyl, or a halogenated phenyl. Moreover, those havingR¹, R² as a methyl group are preferable since the surface energy becomesthe smallest, and it is preferable that a methyl group accounts for 60%or more based on the molar ratio. Moreover, at least one or morereactive group such as a hydroxyl group is provided in a molecular chainat the chain end or the side chain.

Moreover, together with the organo polysiloxane, a stable organo siliconcompound which does not to have the cross-linking reaction such as adimethyl polysiloxane can be mixed therewith.

Such a wettability changeable layer can be formed by preparing a coatingsolution by dispersing the above mentioned components in a solvent; withother additives as needed, and coating the coating solution onto thesubstrate. In this embodiment, the thickness of the wettabilitychangeable layer is preferably in a range of 0.001 μm to 1 μm in termsof the relationship of the wettability change speed by thephotocatalyst, or the like, and it is particularly preferably in a rangeof 0.01 to 0.1 μm.

In this embodiment, by using the wettability changeable layer of theabove mentioned components, according to the function of thephotocatalyst in the photocatalyst processing layer contacted with orlocated with a predetermined interval, the wettability of the exposedpart can be changed so as to be lyophilic using the function of theoxidation, decomposition, or the like of the organic group or theadditive as a part of the above mentioned components so that a largedifference can be generated in the wettability with respect to the nonexposed part. Therefore, by improving the acceptability (lyophilicproperty) and the repellency (liquid repellent property) to a functionalpart composition such as the coloring layer forming coating solution, orthe like, a color filter of a good quality and advantageous in terms ofthe cost, or the like can be provided.

The method for forming a wettability pattern comprising the lyophilicarea and the liquid repellent area on the wettability changeable layeris by the pattern exposure being in contact with the photocatalystprocessing layer as mentioned above.

As the photocatalyst processing layer, the photocatalyst containinglayer to be described later can be used preferably, but this embodimentis not limited thereto, and for example it may be a layer formed onlywith a photocatalyst by the vacuum film formation method, or the like.As to the kind of the photocatalyst to be used, those used in the secondembodiment to be described later can be used as well.

Moreover, in this contact embodiment, it may be contacted actually, orexposure can be carried out in a state with a gap of 200 μm or less,particularly in a range of 0.2 μm to 10 μm, specially in a range of 1 μmto 5 μm formed between the wettability changeable layer andphotocatalyst processing layer.

(2) SECOND EMBODIMENT

This embodiment is an embodiment of the wettability variable layer is aphotocatalyst containing layer comprising a photocatalyst and a binder.

Since the definition of the lyophilic area and the liquid repellent areaon the photocatalyst containing layer, the wettability range, or thelike are same as the explanation in the first embodiment, explanationhere is omitted.

The above-mentioned photocatalyst containing layer used in thisembodiment comprises at least a photocatalyst and a binder. By makingthe layer as above, the critical surface tension can be made higher bythe change of the components in the binder by the photocatalyst functionby the energy irradiation so that the wettability pattern can be formedeasily as a result.

Although the function mechanism of the photocatalyst represented by atitanium oxide to be described later in the photocatalyst containinglayer is not always clear, it is considered that a carrier produced bythe light irradiation provides the change in the chemical structure ofan organic substance by the direct reaction with a compound in thevicinity or by the active oxygen species generated in the presence of anoxygen and water.

When the photocatalyst containing layer is used as the wettabilityvariable layer in this embodiment, by the photocatalyst, using thefunction of oxidation, decomposition, or the like of the organic groupor the additive as a part of the binder, the wettability of the energyirradiated part is changes so as to be lyophilic so that a largedifference can be generated with respect to the wettability theunirradiated part.

Moreover, when such a photocatalyst containing layer is used in thisembodiment, the photocatalyst containing layer may be formed such thatthe photocatalyst containing layer contains at least a photocatalyst anda fluorine, and furthermore, the fluorine content of the photocatalystcontaining layer surface is lowered by the function of the photocatalystat the time of the energy irradiation to the photocatalyst containinglayer with respect to the state before the energy irradiation.

The fluorine content in the lyophilic area, having a low fluorinecontent formed by the energy irradiation, is 10 or less with respect tothe fluorine content in the area without the energy irradiation as 100,more preferably 5 or less, particularly preferably 1 or less.

The measurement of the fluorine content in the photocatalyst containinglayer can be carried out using various commonly executed methods, and itis not particularly limited as long as it is a method capable ofmeasuring the fluorine amount quantitatively on the surface such as theX-ray photoelectron spectroscopy, ESCA (it is referred to also as theelectron Spectroscopy for chemical Analysis), the fluorescent X rayanalysis method, the mass spectrometry method, or the like.

As the photocatalyst used in this embodiment, those known as photosemiconductors, such as a titanium oxide (TiO₂), a zinc oxide (ZnO), atin oxide (SnO₂), a strontium titanate (SrTiO₃), tungsten oxide (WO₃),bismuth oxide (Bi₂O₃), and an iron oxide (Fe₂O₃) can be presented, andone kind or two or more kinds as a mixture can be selected and used fromthem.

In this embodiment, in particular, a titanium oxide can be usedpreferably since it has high band gap energy, it is chemically stablewithout the toxicity, and it can be obtained easily. There are ananatase type and a rutile type in the titanium oxides, and either can beused in this embodiment, and the anatase type titanium oxide ispreferable. The anatase type titanium oxide has a 380 nm or lessexcitation wavelength.

As the anatase type titanium oxide, for example, a hydrochloric acidpeptization type anatase type titania sol (STS-02 (average particle size7 nm) manufactured by Ishihara Sangyo Kaisha, Ltd., or ST-K01manufactured by Ishihara Sangyo Kaisha, Ltd.), a nitric acid peptizationtype anatase type titania sol (TA-15 (average particle size 12 nm)manufactured by Nissan Chemical Industries, Ltd.), or the like can bepresented.

Smaller the particle size of the photocatalyst is, the photocatalystreaction is generated more effectively, and thus it is preferable. Anaverage particle size of 50 nm or less is preferable, and use of aphotocatalyst of 20 nm or less is particularly preferable. Moreover,smaller particle size of the photocatalyst is, the surface roughness ofthe formed photocatalyst containing layer becomes smaller, and thus itis preferable. When the photocatalyst particle size exceeds 100 nm, thecenter line average surface roughness of the photocatalyst containinglayer becomes coarse so that the liquid repellent property of theunexposed part in the photocatalyst containing layer is lowered, andfurthermore, appearance of the lyophilic property in the exposed partbecomes insufficient, and thus it is not preferable.

The photocatalyst containing layer used in this embodiment has thephotocatalyst and binder as the main components. Since the binder usedhere is same as those of the embodiment to be coated on the basematerial, explained for the wettability changeable layer, explanation isomitted here.

For the photocatalyst containing layer in this embodiment, a surfactantcan be contained further in addition to the photocatalyst and binder.Specifically, hydrocarbon based ones such as product name; NIKKOL BL,BC, BO, BB series manufactured by Nikko Chemicals Co., Ltd., fluorinebased or silicone based nonionic surfactants such as ZONYL FSN, or FSOmanufactured by Du Pont Kabushiki Kaisha, SURFLON S-141, or 145manufactured by Asahi Glass Company, MAGAFAKKU F-141, or 144manufactured by Dainippon Ink and Chemicals, Incorporated, FUTAGENTF-200, or F251 manufactured by Neos, UNIDYNE DS-401, or 402 manufacturedby DAIKIN INDUSTRIES, Ltd., and FLUORAD FC-170, or 176 manufactured by3M can be presented. Moreover, cationic surfactants, anionicsurfactants, and amphoteric surfactants can be used as well.

Moreover, for the photocatalyst containing layer, in addition to thesurfactants, oligomers and polymers, such as a polyvinyl alcohol, anunsaturated polyester, an acrylic resin, a polyethylene, a diallylphthalate, an ethylene propylene diene monomer, an epoxy resin, a phenolresin, a polyurethane, a melamine resin, a polycarbonate, a polyvinylchloride, a polyamide, a polyimide, a styrelene butadiene rubber, achloroprene rubber, a polypropylene, a polybutylene, a polystyrene, apolyvinyl acetate, a polyester, a polybutadiene, a polybenzimidazol, apolyacrylic nitrile, an epichlorohydrine, a polysulfide, and apolyisoprene can be contained.

The content of the photocatalyst in the photocatalyst containing layercan be set in a range of 5 to 60% by weight, and preferably in a rangeof 20 to 40% by weight. Moreover, the thickness of the photocatalystcontaining layer is preferably in a range of 0.05 to 10 μm.

The above-mentioned photocatalyst containing layer can be formed bydispersing the photocatalyst and the binder in a solvent, with the otheradditives as needed, so as to prepare a coating solution, and coatingthe coating solution. As the solvent to be used, an alcohol basedorganic solvent such as an ethanol, and an isopropanol is preferable.The coating operation can be carried out by a known coating method suchas spin coating, spray coating, dip coating, roll coating and beadcoating. When an ultraviolet ray curing type component is contained asthe binder, the photocatalyst containing layer can be formed byexecuting a curing process by irradiating an ultraviolet ray.

6. Method for Manufacturing Color Filter

Finally, the method for manufacturing a color filter of the presentinvention will be explained. FIG. 9 shows an example of a color filterproduction process.

As shown in FIG. 9A, a black matrix 420 is formed on a transparentsubstrate 410 of a glass, or the like. Then, as shown in FIG. 9B, bycoating a photocatalyst containing layer forming coating solution by thespin coating method, or the like, and curing, a photocatalyst containinglayer 430 is formed. With a photo mask M located between a light source(not shown in the Fig.) and the photocatalyst containing layer 430 suchthat an ultraviolet ray is irradiated as a pattern in the area to havethe coloring layer formed, a light beam is irradiated from the lightsource. Thereby, the part with the light irradiation in thephotocatalyst containing layer 430 becomes a lyophilic area 431, and thepart without the light irradiation becomes a water repellent area 432.

These processes are for manufacturing a substrate 400 used in thedischarging system 1, and they are called a substrate adjusting process.In the process shown in FIG. 9D, with the substrate 400 accordinglyproduced placed on the stage 350 of the producing apparatus U3, theliquid droplets for forming the coloring layer are discharged from thepiezoelectric driving type head unit 300 so as to form the coloringlayer. At the time, since the liquid droplets discharged from eachpiezoelectric driving type head H1 to Hn are thinned out as needed, evenwhen the discharging amounts of the piezoelectric driving type heads H1to Hn differ, an even color filter without irregularity can be produced.

In the example of the above mentioned method for manufacturing a colorfilter, although the example using the photocatalyst containing layer asthe second embodiment of the method for manufacturing a pattern formingbody is shown, in the present invention, an embodiment using thewettability changeable layer shown in the first embodiment can be usedas well.

As the coloring layer forming coating solution for forming the abovementioned coloring layer, it is not particularly limited as long as itis a coloring layer forming coating solution to be coated by an ink jetapparatus. Moreover, as the above mentioned black matrix, a metal thinfilm of a chromium, or the like, or a light blocking resin, or the likeordinarily used can be used.

In the method for manufacturing a color filter of the present invention,a color filter is produced by executing additional processes such asformation of a transparent electrode layer, and formation of aprotection layer, as needed.

7. Modified Embodiment

The present invention is not limited to the above mentioned embodiments.The above-mentioned embodiments are examples, and for example thebelow-mentioned modification can be executed. Moreover, any one havingthe configuration substantially same as the technological idea disclosedin the claims of the present invention, and providing the same effectsis included in the technological scope of the present invention.

(1) Although the ink jet apparatus in the above mentioned embodiments isexplained as a part of the producing apparatus for a color filter, thepresent invention is not limited thereto, and it is of course adoptablein a printer apparatus for printing by discharging an ink to a recordingmedium such as a paper.

(2) Although the ink discharging is executed using the piezoelectricdriving type heads H1 to Hn in the above mentioned embodiments, thepresent invention is not limited thereto, and a thermal ink jet typehead for forming bubbles by heating a heater in the nozzle, and pushingout an ink by the bubbles can be used as well.

EXAMPLES Formation of the Lyophilic Pattern onto the TransparentSubstrate

A photocatalyst containing layer containing a photocatalyst and a binderwas formed on a 300×400 mm non alkaline glass substrate. In this state,the wettability variable layer had the ink repellent property. Byirradiating an ultraviolet ray via a linear mask pattern having a 90μm×200,000 μm opening part, and 1,024 pieces of a 100 μm pitch, alyophilic line pattern of the same pitch was formed on the photocatalystcontaining layer.

(Confirmation of the Ink Jet Discharging Amount)

A piezoelectric driving type inkjet head having 128 pieces ofdischarging holes was prepared. The ink drop volume discharged from eachdischarging hole was measured so that it was found to be 20 pL/drop byaverage, 18 pL/drop by the smallest, and 22 pL/drop by the largest. Thatis, it was confirmed that there was ±1-0% irregularity with respect tothe average discharging amount.

(Bit Map Production)

The discharging amount necessary for the color filter production wascalculated based on the drop amount so that it was found out that 9,000drops are needed for one line by the discharge from the discharging holewith the smallest discharging amount. Therefore, bit map data for 9,000dots per one line, for 1,024 lines were produced. As the default, 90% ofdots in the 9,000 dots for one line were provided as “1”, and theremaining 10% of dots were provided as “0”.

(Bit Map Adjustment)

The bit map data for all the lines were adjusted according to thedischarging amount from each discharging hole of the ink jet. Forexample, in the case of the data of a line corresponding to thedischarging hole smaller than the discharging amount average value by5%, the dots to be “1” are increased by 5%, and in the case of the dataof a line corresponding to the discharging hole larger than thedischarging amount average value by 8%, the dots to be “1” are thinnedout by 8%.

(Ink Jet Coating, Production of the Color Filter)

Based on the produced bit map data, a color filter manufacturing ink wasdischarged form the ink jet head so as to be impacted on the lyophilicpattern of the transparent substrate having the lyophilic pattern. Theimpacted ink wet and spread evenly in the lyophilic part. By curing anddrying the same, a 1 μm film thickness linear color filter was produced.The film thickness difference of the each line was within ±1%.

1. A method for manufacturing a pattern forming body comprising: formingof a pattern of a lyophilic area on a substrate surface, where liquiddroplets wet and spread, corresponding to the pattern to be formed, andthinning out of the liquid droplet discharge from each head according toa predetermined rule such that the liquid droplet amount per unit areato be impacted on the lyophilic area is made even, wherein forming thepattern on the substrate by discharging a plurality of liquid dropletsto the substrate from each head while changing the relative position ofa head unit with a plurality of integrated heads and the substrate. 2.The method for manufacturing a pattern forming body according to claim1, wherein the each head discharges the liquid droplets based on thedischarging position information, preliminarily determined for the eachhead, showing the position on the lyophilic area of the liquid dropletsto be impacted.
 3. The method for manufacturing a pattern forming bodyaccording to claim 2, wherein the discharging position information isdetermined such that the position of thinning out the liquid dropletdischarge is dispersed substantially even in the lyophilic area.
 4. Themethod for manufacturing a pattern forming body according to claim 2,wherein the discharging position information designates dots to executethe liquid droplet discharge out of the plurality of dots positionedequally on the lyophilic area, and is determined based on the volume ofthe pattern to be formed and the discharging amount of the each head. 5.The method for manufacturing a pattern forming body according to claim4, wherein the discharging position information is produced by methodcomprising: calculating the number of dots in the pattern based on thesmallest discharging amount out of the discharging amounts of the eachhead and the volume of the pattern to be formed, calculating the averagevalue of the discharging amounts of each head, determining the existenceor absence of the discharge for each dot based on the average value,calculating each difference value of the discharging amount of the eachhead and the average value, and adjusting the existence or absence ofthe discharge for each dot based on the difference value.
 6. The methodfor manufacturing a pattern forming body according to claim 4, whereinthe discharging position information is provided by method comprising:calculating the number of dots in the pattern based on the smallestdischarging amount out of the discharging amounts of the each head andthe volume of the pattern to be formed, calculating each differencevalue of the discharging amount of the each head and the smallestdischarging amount, and determining the existence or absence of thedischarge for each dot based on the difference value.
 7. The method formanufacturing a pattern forming body according to claim 2, wherein thedischarging position information is determined so as to thin out theliquid droplet discharge at the end part of the lyophilic area.
 8. Themethod for manufacturing a pattern forming body according to claim 1,wherein the pattern of the lyophilic area formed on the substratesurface is formed by using a wettability variable layer, capable ofchanging the wettability by a function of a photocatalyst accompanied bythe energy pattern irradiation, and irradiating energy in a pattern ontothe wettability variable layer.
 9. The method for manufacturing apattern forming body according to claim 2, wherein the pattern of thelyophilic area formed on the substrate surface is formed by using awettability variable layer, capable of changing the wettability by afunction of a photocatalyst accompanied by the energy patternirradiation, and irradiating energy in a pattern onto the wettabilityvariable layer.
 10. The method for manufacturing a pattern forming bodyaccording to claim 8, wherein the wettability variable layer is awettability changeable layer having the wettability changed by beingcontacted to a photocatalyst processing layer containing aphotocatalyst, or being energy irradiated after located with a gap of200 pm or less.
 11. The method for manufacturing a pattern forming bodyaccording to claim 8, wherein the wettability variable layer is aphotocatalyst containing layer comprising a photocatalyst and a binder,having the wettability changed so as to lower the contact angle with aliquid by the function of the photocatalyst accompanied by the energyirradiation.
 12. The method for manufacturing a pattern forming bodyaccording to claim 10, wherein the photocatalyst is one or two or moresubstances selected from a titanium oxide (TiO₂), a zinc oxide (ZnO), atin oxide (SnO₂), a strontium titanate (SrTiO₃), tungsten oxide (WO₃),bismuth oxide (Bi₂O₃), and an iron oxide (Fe₂O₃).
 13. The method formanufacturing a pattern forming body according to claim 11, wherein thephotocatalyst is one or two or more substances selected from a titaniumoxide (TiO₂), a zinc oxide (ZnO), a tin oxide (SnO₂), a strontiumtitanate (SrTiO₃), tungsten oxide (WO₃), bismuth oxide (Bi₂O₃), and aniron oxide (Fe₂O₃).
 14. The method for manufacturing a pattern formingbody according to claim 12, wherein the photocatalyst is a titaniumoxide (TiO₂).
 15. The method for manufacturing a pattern forming bodyaccording to claim 13, wherein the photocatalyst is a titanium oxide(TiO₂).
 16. The method for manufacturing a pattern forming bodyaccording to claim 10, wherein the wettability changeable layer or thebinder is a layer containing an organo polysiloxane as a hydrolyzedcondensation product or a co-hydrolyzed condensation product of one ortwo or more kinds of silicon compounds represented by Y_(n)SiX(₄₋₂)(here, Y is an alkyl group, a fluoro alkyl group, a vinyl group, anamino group, a phenyl group or an epoxy group, and X is an alkoxylgroup, or a halogen. N is an integer from 0 to 3).
 17. The method formanufacturing a pattern forming body according to claim 11, wherein thewettability changeable layer or in the binder is a layer containing anorgano polysiloxane as a hydrolyzed condensation product or aco-hydrolyzed condensation product of one or two or more kinds ofsilicon compounds represented by Y_(n)SiX(_(4-n)) (here, Y is an alkylgroup, a fluoro alkyl group, a vinyl group, an amino group, a phenylgroup or an epoxy group, and X is an alkoxyl group, or a halogen. N isan integer from 0 to 3).
 18. A method for manufacturing a color filter,comprising a process of, a pattern of a coloring layer forming coatingsolution is formed by using the method for manufacturing a patternforming body according to claim 1, and then curing the same to form acoloring layer.